Design and Simulation of a Three-Phase Electrostatic Cylindrical Rotary Micromotor
نویسنده
چکیده
Nowadays the electrostatic motor finds frequent use in micro-electro-mechanical systems (MEMS) where their drive voltages are below 100 volts. Using moving charged plates in capacitor motors are far easier to fabricate than coils and iron cores. This paper presents a novel design of a three-phase electrostatic rotary motor. It is shown that the angular velocity of the cylindrical type motor is almost 1.8 times greater in comparison with parallel plate type and as the voltage increases the enhancement of slope rate in the angular velocity of the cylindrical type is more tangible compared to the parallel plate type. The effect of changing the gap between rotor and stator on the angular velocity is also studied.
منابع مشابه
Microball - bearing - supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion
This paper presents our latest research activities toward the development of electrostatic micromotors/microgenerators with a microball-bearing support mechanism and benzocyclobutene (BCB) low-k polymer insulating layers. The primary applications of these devices are long-range, high-speed micropositioning, high-speed micro pumping and micro power generation. In this paper, we present the devel...
متن کاملSqueeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors
Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control, and test in various micromotor devices. This paper presents the simulated and experimental squeez...
متن کاملVHDL–AMS modelling and simulation of a planar electrostatic micromotor
System level simulation results of a planar electrostatic micromotor, based on analytical models of the static and dynamic torque behaviours, are presented. A planar variable capacitance (VC) electrostatic micromotor designed, fabricated and tested at LAAS (Toulouse) in 1995 is simulated using the high level language VHDL–AMS (VHSIC (very high speed integrated circuits) hardware description lan...
متن کاملThe Utilization of High Fidelity Simulation in the Support of UAV Launch Phase Design: Three Case Studies
Improvement of the launch phase of a jet powered Unmanned Aerial Vehicle (UAV) with Jet Assisted Take Off (JATO), has been the subject of attention in the UAV industry. Use of flight simulation tools reduces the risk and required some amount of flight testing for complex aerospace systems. Full nonlinear equations of motion are used to study and simulate this maneuver and three case studies of ...
متن کاملDynamic characterization of a linear electrostatic micromotor supported on microball bearings
We report the dynamic characterization of a six-phase, bottom-drive, linear, variable-capacitance micromotor (B-LVCM) supported on microball earings. The B-LVCM was fabricated and tested using a new test-bed. The motion of the micromotor was captured using lowand high-speed ideo cameras, tracked using image processing software, and analyzed to obtain the instantaneous velocity (11 mm/s), accele...
متن کامل